Xiao [9] developed an inexpensive and flexible micro temperature

Xiao [9] developed an inexpensive and flexible micro temperature sensor by using low pressure chemical vapor deposition to deposit phosphosilicate glass to be the sacrificial layer. A layer of polyimide was also coated, followed by use of MEMS technology to fabricate platinum on polyimide. The subsequently flexible sensor can remove the sacrificial layer selleck inhibitor and does not limit the position Inhibitors,Modulators,Libraries of a sensor.Despite macromolecular advantages such as thermal stability, high dimensional stability, and low permittivity, the temperature change is slightly too large. This work attempts either to prevent the film and basic material from flaking off or to decrease the yield rate from the heat stress by using stainless steel foil for a flexible base material of 40 ��m Inhibitors,Modulators,Libraries thickness.

Stainless steel foil must have high corrosion resistance, high compression resistance, high temperature resistance and high flexibility. This work attempts to decrease the interference of a methanol reformer and diagnose the inner environment immediately Inhibitors,Modulators,Libraries by using thin Inhibitors,Modulators,Libraries metal foil as the substrate material of the proposed micro sensor.2.?MethodologyThis section comprises descriptions of a micro flow plate and a micro temperature sensor.2.1. Design of a Micro Flow PlateThe micro flow plate is used in various technologies, in which the appearance of a flow changes with the miniaturization of a flow plate. Thorough elucidation of the characteristics of a flow would increase the scope of potential applications.

Design of a flow channel inside the micro reformer must consider the following factors: heat conduction rate and methanol/air mixing rate, pressure decrease and pressure Dacomitinib distribution, catalyst reaction area and chemistry reaction flow direction, flow rate distribution, mass transfer rate and concentration distribution, as well as viscous energy energy-dissipating and divergence heat transfer [10]. Based on the above factors, the design of a planner flow channel is adopted, as described in the following section2.2. Design of a Micro Temperature SensorConventionally adopted sensors can be classified as contactless or contactable, depending on their sensing mode. Contactable sensors can be classified as resistance temperature detectors, thermistors, thermocouples and mercury thermometers. Additionally, contactless sensors can be categorized into pyroelectric and quantum temperature sensors.

Regardless of whether a contactable or contacless sensor is considered, too large of a volume interferes with the flow and increases the complexity of packaging, making it impossible for them to integrate with a micro channel. Given that a small volume, high precision, production batch and low cost characterize micro sensors based on MEMS technology, www.selleckchem.com/products/MDV3100.html this work presents a flexible micro temperature sensors based on this technology.

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